Additionally, the material selection for the NIL molds is also crucial in overcoming critical issues such as the well-known mold sticking issue and thermal expansion mismatch issue (for thermal NIL processes) as well as to prolong its lifespan [4, 9, 40]. Flat mold fabrication for P2P and R2P NIL For P2P and R2P (using a flat mold) NIL processes, the micro/nanostructures are normally patterned onto rigid substrates such as silicon or quartz using conventional techniques (i.e., EBL) [3, 21, 22, 48] or even nanoimprint lithography [30], where the patterns are then etched into the substrate using

reactive ion etching (RIE) to be used as a flat mold in the NIL process. Other techniques such as focused ion beam (FIB) was also explored by Taniguchi and the team [54] to fabricate molds for the NIL process, which was Pexidartinib in vivo reported to be suitable FK228 solubility dmso for speedy

fabrication of 3D molds with a depth resolution down to 10 nm. To prevent the sticking issues from occurring during imprinting, the surface of the mold is usually coated with a thin layer of anti-stick coating such as fluorinated silanes [21, 55] or polybenzoxazine [56]. In some studies, the patterned resist layer is used directly as the mold surface (with or without anti-stick coating) without etching process as observed in the works of Mohamed Thiazovivin mouse [2] and Ishii and Taniguchi [57]. Alternatively, a flat mold may also be conducted using a soft mold,

where a polymer imprint replica of the master mold is used as the mold for the imprinting process as observed in the work of Plachetka et al. [16] and Ye et al. [58]. The imprint replica is usually made using a polymer cast molding technique, where the process is as follows: First, the solution of a polymer with low surface energy such as PDMS is poured onto the patterned master and then spin-coated to achieve a uniform and the desired thickness. The PDMS-coated master is then put in the vacuum for several hours to release the trapped air bubbles to allow complete filling of cavities, before being cured at an elevated temperature (120°C for 15 min for Sylgard® 184 PDMS [58]) and peeled off to be used as the soft mold. Soft mold imprinting provides a simple and good alternative to the conventional wafer imprinting as multiple copies else of the soft mold are easily produced using a simple and low-cost method [59], besides the fact that the low surface energy of PDMS allowed it to be used directly for imprinting without the need for anti-stick layers [16, 58]. Roller mold fabrication for R2P and R2R NIL However, unlike P2P and R2P NIL processes which utilize a flat mold, continuous R2R and R2P (using a roller mold) NIL processes require a roller mold for imprinting. Out of all the available fabrication techniques, a flexible mold is generally used in the application of a roller mold.